Lam Research Offers New Capabilities in its Edge Yield Product Portfolio
December 03 2019 - 7:00AM
Lam Research Corp. (Nasdaq: LRCX) is offering new capabilities in
its semiconductor manufacturing systems portfolio to further
improve device yield at the edge of the wafer, which is essential
to delivering greater productivity for customers.
During the semiconductor production process, device
manufacturers want to build integrated circuits on the entire
surface of the wafer. On the edge of the wafer, where chemical,
physical and thermal discontinuities are harder to control, the
risk of yield loss increases. Controlling etch non-uniformity and
preventing defects at the wafer’s edge is key to semiconductor
device manufacturing cost reduction.
Lam offers edge yield solutions for high volume manufacturing
with the Corvus® etch and Coronus® plasma bevel clean systems.
These solutions can be found in leading-edge node manufacturing
facilities around the world and are extensively used by advanced
foundry, logic, DRAM, and NAND customers.
Corvus enhances edge yield on the Kiyo® and Versys® Metal
systems by smoothing out extreme edge discontinuities. With Corvus,
every die on the wafer sees the same conditions for optimal yield,
reducing previously seen systematic die-to-die variability. Lam’s
Corvus technology also minimizes deviation at the edge using its
tunability features.
Coronus improves device yield by removing defect sources from
the bevel region or depositing encapsulating layers for bevel
protection. Coronus’ versatility manages bevel challenges such as
eliminating defects from film/polymer residues and roughened
surfaces, as well as depositing layers for bevel protection during
long otherwise damaging etch processes. The Coronus product family
demonstrates excellent repeatability enabled by proprietary wafer
placement and plasma confinement technologies.
“Substantially increasing yield at the edge of a wafer is a
significant factor in terms of reducing costs at advanced nodes,”
said Vahid Vahedi, senior vice president and general manager of the
Etch product group at Lam Research. “Lam collaborates with
customers very early in the development process, which allows us to
identify and solve the unique technical challenges they face at the
edge of the wafer. Lam has extended our capabilities for improved
productivity and greater yield that is critical for cost-effective
device scaling.”
About Lam ResearchLam Research
Corporation is a global supplier of innovative wafer
fabrication equipment and services to the semiconductor industry.
As a trusted, collaborative partner to the world’s leading
semiconductor companies, we combine superior systems engineering
capability, technology leadership, and unwavering commitment to
customer success to accelerate innovation through enhanced device
performance. In fact, today, nearly every advanced chip is built
with Lam technology. Lam Research (Nasdaq: LRCX) is a
FORTUNE 500® company headquartered in Fremont, Calif., with
operations around the globe. Learn more
at www.lamresearch.com. (LRCX-P)
Caution Regarding Forward-Looking
Statements
Statements made in this press release that are not of historical
fact are forward-looking statements and are subject to the safe
harbor provisions created by the Private Securities Litigation
Reform Act of 1995. Such forward-looking statements relate to, but
are not limited: the performance of the tools we sell; the
requirements of our customers for edge yield management; the cost
effectiveness of our tool offerings; our ability to enable greater
yield, and hence higher profitability for manufacturing advanced
devices; and the benefits that we achieve from our customer
collaborations. These statements are based on current expectations
and are subject to risks, uncertainties, and changes in condition,
significance, value and effect including those risks and
uncertainties that are described in the documents filed or
furnished by us with the Securities and Exchange
Commission, including specifically our annual report on Form 10-K
for the fiscal year ended June 30, 2019 and our quarterly report on
Form 10-Q for the fiscal quarter ended September 29, 2019. These
uncertainties and changes could materially affect the
forward-looking statements and cause actual results to vary from
expectations in a material way. The Company undertakes no
obligation to update the information or statements made in this
release.
Company Contacts: Libra White Media Relations
510-572-7725 publicrelations@lamresearch.com Ram Ganesh Investor
Relations (510) 572-1615 investor.relations@lamresearch.com
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