BEVERLY, Mass., June 23, 2015 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling
ion implantation solutions for the semiconductor industry,
announced that it has received a multi system, follow on order for
the Purion XE™ high energy implanter from a major chipmaker in the
Asia Pacific Region. The systems will be used to support a capacity
expansion for 3D NAND Flash devices. The systems are
scheduled to ship in the third quarter.
John Aldeborgh, executive vice
president, customer operations, said, "We are very pleased to
receive this follow on order and be the process tool of record for
this fab. The Purion XE is the most advanced high energy
system available today, and was designed specifically to provide
customers with absolute process precision and purity while
delivering remarkable levels of capital efficiency."
Bill Bintz, executive vice
president, marketing and engineering, commented, "The advanced NAND
segment, with its high level of capital intensity for high energy
implanters, represents a significant opportunity for the Purion
XE. The Purion XE is ideally suited for this segment, since
next generation 3D NAND processes demand more precise doping and
angle control to ensure high levels of performance and yield, and
the Purion XE excels at both of these challenges."
The Purion Platform
The Purion platform redefines the
ion implanter application space, delivering unmatched purity,
precision and productivity to enhance customers' device performance
and yield. On this platform, we've built the industry's
first complete implant product solution designed specifically for
advanced planar and 3D devices while providing the most flexible
and productive manufacturing capability for your fab. The systems'
common cross-product platform architecture is designed to drive
manufacturing flexibility and lower the total cost of fab
operations. All Purion implanters incorporate Axcelis' industry
leading Purion Contamination Shield™ Defense System, for
unsurpassed implant quality, so even the most sensitive devices can
realize optimized device performance. The platform's
proprietary Purion Vector™ dose and angle control system, and
constant focal length scanning deliver the most precise and
repeatable dopant placement available today. The
platform's superior beam current performance combined with the
Purion™ 500wph end station provides the industry's highest
productivity. The Purion platform includes the Purion M™ medium
current implanter, the Purion H™ high current implanter, and the
Purion XE™ high energy implanter.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for over 35 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.