FORM 3
        
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

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Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
                      

1. Name and Address of Reporting Person *

Fiordalice Robert
2. Date of Event Requiring Statement (MM/DD/YYYY)
1/26/2022 

3. Issuer Name and Ticker or Trading Symbol

ONTO INNOVATION INC. [ONTO]
(Last)        (First)        (Middle)

C/O ONTO INNOVATION INC., 16 JONSPIN ROAD
4. Relationship of Reporting Person(s) to Issuer (Check all applicable)

_____ Director                          _____ 10% Owner
___X___ Officer (give title below)        _____ Other (specify below)
SVP & GM, MBU /
(Street)

WILMINGTON, MA 01887      

(City)              (State)              (Zip)
5. If Amendment, Date Original Filed(MM/DD/YYYY)
 

6. Individual or Joint/Group Filing(Check Applicable Line)

_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)
2. Amount of Securities Beneficially Owned
(Instr. 4)
3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)
4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock 11281 (1)D  

Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivate Security
(Instr. 4)
2. Date Exercisable and Expiration Date
(MM/DD/YYYY)
3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)
4. Conversion or Exercise Price of Derivative Security5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)
6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date ExercisableExpiration DateTitleAmount or Number of Shares
Performance Stock Unit  (2)2/7/2022 Common Stock 845  (2)D  
Performance Stock Unit  (2)2/7/2023 Common Stock 845  (2)D  
Performance Stock Unit  (2)2/8/2023 Common Stock 704  (2)D  
Performance Stock Unit  (2)2/8/2024 Common Stock 703  (2)D  

Explanation of Responses:
(1) 3,928 shares are represented by restricted stock units (RSUs). Each RSU represents a contingent right to receive one share of ONTO common stock. The RSUs vest on an annual basis, in equal 1/3rd increments, over a three-year period from the award date.
(2) Shares are represented by performance stock units (PSUs). Each PSU represents a contingent right to receive one share of ONTO common stock. The number of PSUs reported represents the target number of PSUs under the award. The number of PSUs that vest, if any, may vary from 0% to 200% of the target number shown, and is based on specific performance criteria from the award date through the expiration date.

Reporting Owners
Reporting Owner Name / Address
Relationships
Director10% OwnerOfficerOther
Fiordalice Robert
C/O ONTO INNOVATION INC.
16 JONSPIN ROAD
WILMINGTON, MA 01887


SVP & GM, MBU

Signatures
By: /s/ Steven R. Roth For: Robert Fiordalice1/28/2022
**Signature of Reporting PersonDate

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