AIXTRON Enters Into an R&D Alliance With a Top Tier IC Manufacturer AACHEN, Germany, March 15 /PRNewswire-FirstCall/ -- AIXTRON AG (FSE: AIX; ISIN DE0005066203), a leading provider of deposition equipment to the semiconductor industry, and a major IC manufacturer have entered into an R&D alliance to qualify novel metals for the production of sub 45nm generation logic devices. Sub-45 nm process technologies will require advanced materials and innovative deposition solutions in order to stay at the forefront of the semiconductor technology roadmap. This is particularly true for the transistor gate stack in logic devices where many top IC manufactures are putting in substantial efforts to overcome the hurdles limiting the realization of future device scaling. This joint program will focus on metal gate electrode development for sub 45nm CMOS generations. The initial work will focus on: -- Evaluation of various metal gate materials for large-scale production purposes -- Integration of those materials into high-k gate stacks -- Optimization of PMOS as well as NMOS device structures for Sub-45nm logic The process and material development work will be conducted on an AIXTRON Tricent(R) AVD(R) (Atomic Vapor Deposition) system offering 200 and 300 mm wafer processing capabilities. AIXTRON's patented proprietary AVD(R) technology enables atomic scale thickness control, while achieving high deposition rates, by utilizing the unique TRIJET(R) pulsed precursor injection source. This proprietary technology allows the simultaneous injection of precursor chemistries, providing outstanding control of the deposition of multi-component materials. Tim McEntee, Executive Vice President and COO Semiconductor Equipment of AIXTRON AG, commented: "This agreement represents an important step forward in further strengthening AIXTRON's position for providing enabling deposition solutions for these emerging semiconductor applications. By forging this partnership with one of the top IC manufacturers in the industry, AIXTRON will remain at the forefront of cutting edge enabling MOCVD process technology development, building on its 20-year history of delivering complex material solutions to the high-tech industry." McEntee continued: "We look forward to combining our knowledge and experience to develop solutions to address these new material challenges. Equally, this program represents an important complementary effort to AIXTRON's on-going high-k development activities within the MEDEA T207 program at ST Microelectronics in Crolles (F) as well as AIXTRON's ongoing JDP program in partnership with IMEC." About AIXTRON AIXTRON AG is a leading provider of equipment for compound semiconductor epitaxy. The Company's products are used by a diverse range of customers worldwide to manufacture advanced semiconductor components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors, and VCSELs used in fiber optic communication systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading-edge technologies. AIXTRON AG's securities are listed in the Prime Standard market segment of the Frankfurt Stock Exchange and are included both in the TecDAX index and the MSCI World Index. More information about AIXTRON can be found on the Web at http://www.aixtron.com/. Forward-Looking Statements This news release may contain forward-looking statements about the business, financial condition, results of operations and earnings outlook of AIXTRON within the meaning of the "safe harbor" provisions of the United States Private Securities Litigation Reform Act of 1995. Words such as "may," "will," "expect," "anticipate," "contemplate," "intend," "plans," "believe," "continue" and "estimate," and variations of these words and similar expressions, identify these forward-looking statements. These statements are not guarantees of future performance, involve certain risks, uncertainties and assumptions that are difficult to predict, and are based upon assumptions as to future events that may not prove accurate. Therefore, actual outcomes and results may differ materially from what is expressed herein. In any forward- looking statement in which AIXTRON expresses an expectation or belief as to future results, such expectation or belief is expressed in good faith and believed to have a reasonable basis, but there can be no assurance that the statement or expectation or belief will result or be achieved or accomplished. Actual operating results may differ materially from such forward-looking statements and are subject to certain risks, including risks arising from: actual customer orders received by AIXTRON; the extent to which metal-organic chemical vapor deposition, or MOCVD, technology is demanded by the market place; the timing of final acceptance of products by customers; the financial climate and accessibility of financing; general conditions in the thin film equipment market and in the macro-economy; cancellations, rescheduling or delays in product shipments; manufacturing capacity constraints; lengthy sales and qualification cycles; difficulties in the production process; changes in semiconductor industry growth; increased competition; exchange rate fluctuations; availability of government funding; variability and availability of interest rates; delays in developing and commercializing new products; general economic conditions being less favorable than expected; and other factors. The forward-looking statements contained in this news release are made as of the date hereof and AIXTRON does not assume any obligation to (and expressly disclaims any such obligation to) update the reasons why actual results could differ materially from those projected in the forward-looking statements. Any reference to the Internet website of AIXTRON is not an incorporation by reference of such information in this news release, and you should not interpret such a reference as an incorporation by reference of such information. DATASOURCE: AIXTRON AG CONTACT: Investor Relations and Corporate Communications of AIXTRON AG, +49-241-8909-444, or fax, +49-241-8909-445, or Web site: http://www.aixtron.com/

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