FORM 3
        
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

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Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
                      

1. Name and Address of Reporting Person *

HASS ROBERT T

2. Date of Event Requiring Statement (MM/DD/YYYY)
4/1/2016 

3. Issuer Name and Ticker or Trading Symbol

AMTECH SYSTEMS INC [ASYS]

(Last)        (First)        (Middle)

C/O AMTECH SYSTEMS, INC., 131 SOUTH CLARK DRIVE

4. Relationship of Reporting Person(s) to Issuer (Check all applicable)

_____ Director                            _____ 10% Owner
___ X ___ Officer (give title below)          _____ Other (specify below)
Interim CFO /

(Street)

TEMPE, AZ 85281       

(City)              (State)              (Zip)
5. If Amendment, Date Original Filed (MM/DD/YYYY)

 

6. Individual or Joint/Group Filing (Check Applicable Line)

_ X _ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person


Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)
2. Amount of Securities Beneficially Owned
(Instr. 4)
3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)
4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock   1582   D    

Table II - Derivative Securities Beneficially Owned ( e.g. , puts, calls, warrants, options, convertible securities)
1. Title of Derivate Security
(Instr. 4)
2. Date Exercisable and Expiration Date
(MM/DD/YYYY)
3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)
4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)
6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Stock Options (right to buy)     (1) 12/9/2018   Amtech Systems, Inc. $.01 par value common stock   3884.0   (2) $3.8   D    
Stock Options (right to buy)     (3) 11/20/2019   Amtech Systems, Inc. $.01 par value common stock   2667.0   $6.15   D    
Stock Options (right to buy)     (4) 8/6/2020   Amtech Systems, Inc. $.01 par value common stock   1333.0   $10.64   D    
Stock Options (right to buy)     (5) 12/15/2021   Amtech Systems, Inc. $.01 par value common stock   5000.0   $7.98   D    
Stock Options (right to buy)     (6) 12/11/2022   Amtech Systems, Inc. $.01 par value common stock   9938.0   (7) $2.95   D    
Stock Options (right to buy)     (8) 12/12/2023   Amtech Systems, Inc. $.01 par value common stock   5000.0   $7.01   D    
Stock Options (right to buy)     (9) 11/19/2024   Amtech Systems, Inc. $.01 par value common stock   2500.0   $9.98   D    

Explanation of Responses:
( 1)  Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 12/09/2008 grant date.
( 2)  Reporting person has exercised 5,116 of the 9,000 vested options.
( 3)  Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 11/20/2009 grant date.
( 4)  Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 08/06/2010 grant date.
( 5)  Stock options vested one-fourth (1/4) annually commencing on the first anniversary of the 12/15/2011 grant date.
( 6)  Stock options vest one-fourth (1/4) annually commencing on the first anniversary of the 12/11/2012 grant date.
( 7)  Reporting person has exercised 1,000 of the 10,938 vested options.
( 8)  Stock options vested one-half (1/2) annually commencing on the first anniversary of the 12/12/2013 grant date.
( 9)  Stock options vest one-half (1/2) annually commencing on the first anniversary of the 11/19/2014 grant date.

Reporting Owners
Reporting Owner Name / Address
Relationships
Director 10% Owner Officer Other
HASS ROBERT T
C/O AMTECH SYSTEMS, INC.
131 SOUTH CLARK DRIVE
TEMPE, AZ 85281


Interim CFO

Signatures
/s/ Robert T Hass 4/4/2016
** Signature of Reporting Person Date


Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
Note: File three copies of this Form, one of which must be manually signed. If space is insufficient, see Instruction 6 for procedure.
Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB control number.
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