SCREEN Semiconductor Solutions and IBM Research to Collaborate on Advanced Logic Process Research in Albany, New York
October 11 2016 - 8:00PM
Business Wire
SCREEN Semiconductor Solutions Co., Ltd. (SCREEN) is preparing
to install our first of three key tool sets into the IBM Research
(IBM) Albany Nanotech, Semiconductor Research Center this year. The
SCREEN single wafer clean, laser anneal and coat/develop track
equipment suite will support IBM’s advanced semiconductor
technology research, and complements the EUV Center of Excellence
tool set in Albany, New York.
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“IBM is committed to an aggressive research agenda that pushes
the limits of semiconductor technology,” said Mukesh Khare, vice
president of IBM Research’s Semiconductor Group. “Innovations in
materials, processes and device structures are essential to
accelerate technology research in order to meet the demands of
future cloud computing and cognitive systems.”
“We are very pleased to be chosen by IBM as they research
advanced logic semiconductors,” noted Tadahiro Suhara, President of
SCREEN Semiconductor Solutions, “For us this is a testament to the
value our SCREEN equipment technology and resources bring to
advance semiconductor process development in multiple fields: wet
clean, thermal anneal, and coat/develop track.”
The first of the SCREEN equipment trio installation for IBM will
be the Aquaspin SU-3200 which was designed to develop highly
selective, residue free and damage free wet clean process
applications in semiconductor fabrication for advanced nodes
including 7nm and beyond. IBM will also evaluate nanosecond-scale
UV laser anneal applications, including melt activation and
re-crystallization of critical layers, with the LT-3100 system
delivery from Laser Systems and Solutions of Europe (LASSE),
SCREEN’s subsidiary based in France. We anticipate upon favorable
results that IBM will integrate the DT-3000 DUO Track system to
advance Directed Self-Assembly (DSA), Spin-On Dielectrics (SOD) and
under layer coatings with the EUV Center of Excellence lithography
patterning tool set.
These three new SCREEN tool sets are expected to be delivered
before yearend to the IBM Research, Albany Nanotech site cleanrooms
within the SUNY Polytechnic Institute’s Colleges of Nanoscale
Science and Engineering (CNSE). This 300 mm wafer size equipment
set for IBM will expand SCREEN’s presence in Albany.
About IBM Research
For more than seven decades, IBM Research has defined the future
of information technology with more than 3,000 researchers in 13
labs located across six continents. Scientists from IBM Research
have produced six Nobel Laureates, 10 U.S. National Medals of
Technology, five U.S. National Medals of Science, six Turing
Awards, 19 inductees in the National Academy of Sciences and 19
inductees into the U.S. National Inventors Hall of Fame.For more
information about IBM Research, visit www.ibm.com/research.
About SCREEN Semiconductor Solutions Co., Ltd.
SCREEN Semiconductor Solutions has been established as a group
company of SCREEN Holdings inheriting the semiconductor equipment
business from its predecessor, Dainippon Screen. SCREEN is a
specialized manufacturer in various areas such as wafer cleaning
equipment, lithography equipment and thermal anneals, and is one of
the world’s top 10 equipment suppliers to the semiconductor
manufacturing industry.For more information, please visit
www.screen.co.jp/eng/spe.
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SCREEN Semiconductor Solutions Co.,
Ltd.+81-75-417-2527speinfo@screen.co.jp