BEVERLY, Mass., Feb. 26,
2015 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a
leading supplier of enabling ion implantation solutions for the
semiconductor industry, announced that it has received a new order
for the Company's Purion XE™ single wafer, high energy implanter.
The Purion XE will support a new capacity expansion at a memory fab
in the Asia Pacific Region, and will be used in high volume
production of 3D NAND Flash devices. The system shipped in
the first quarter.
John Aldeborgh, executive vice
president, customer operations, said, "It is exciting to be a part
of this new phase of growth in the memory market. The Purion XE is
the process tool of record for this customer because of its
exceptionally broad energy range and high beam currents, which
translate directly to capital efficiency. We look forward to
growing our installed base as they expand their manufacturing
capabilities."
The Purion XE, featuring Axcelis' industry leading LINAC
technology, is the most advanced high energy system available
today. The system leverages the power of our Purion platform,
providing chipmakers with absolute process precision and purity
while delivering remarkable levels of productivity and capital
efficiency.
The Purion Platform
The Purion platform redefines the
ion implanter application space, delivering unmatched purity,
precision and productivity to enhance customers' device performance
and yield. On this platform, we've built the industry's
first complete implant product solution designed specifically for
advanced planar and 3D devices while providing the most flexible
and productive manufacturing capability for your fab. The systems'
common cross-product platform architecture is designed to drive
manufacturing flexibility and lower the total cost of fab
operations. All Purion implanters incorporate Axcelis' industry
leading Purion Contamination Shield™ Defense System, for
unsurpassed implant quality, so even the most sensitive devices can
realize optimized device performance. The platform's
proprietary Purion Vector™ dose and angle control system, and
constant focal length scanning deliver the most precise and
repeatable dopant placement available today. The
platform's superior beam current performance combined with the
Purion™ 500wph end station provides the industry's highest
productivity. The Purion platform includes the Purion M™ medium
current implanter, the Purion H™ high current implanter, and the
Purion XE™ high energy implanter.
About Axcelis:
Axcelis (Nasdaq: ACLS),
headquartered in Beverly, Mass.,
has been providing innovative, high-productivity solutions for the
semiconductor industry for over 35 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart
(editorial/media) 978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.