BEVERLY, Mass., Oct. 3, 2016 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today that it has received its first order for
the Purion VXE™, a new extended energy range model of Axcelis'
industry leading Purion XE™ high energy implanter. The new
system delivers the highest energy range in the Purion platform.
The customer plans to use the 300mm Purion VXE to support R&D
for image sensors in the mobile and IoT markets. The system is
scheduled to ship in the fourth quarter.
John Aldeborgh, executive vice
president, customer operations, commented, "We're excited about the
opportunity to provide this new model of the Purion XE platform to
support the burgeoning image sensors and power device
markets. The Purion EXE™ and VXE, provide the highest energy
levels available in a production implanter, to perform ultra-high
energy implants, with extremely precise and deep doping profiles."
He added, "The Purion platform's common architecture, along with
its industry leading LINAC technology, has allowed Axcelis to
rapidly expand the capabilities of our high energy product line to
meet the needs of customers' continually advancing technology."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.