BEVERLY, Mass., April 7, 2015 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling
ion implantation solutions for the semiconductor industry,
announced that it has received a follow on order for the Purion XE™
single wafer, high energy implanter. The system will support a
capacity expansion at the customer's new 300mm foundry in
Asia. The system is scheduled to ship in the second
quarter.
John Aldeborgh, executive vice
president, customer operations, said, "We're very pleased to expand
our high energy installed base and support their transition to
300mm volume production. The growth of mobile computing and
the Internet of Things has created significant demand that existing
equipment can't meet. The adoption of the 300mm Purion XE will
ensure a rapid process transfer and provide them with a significant
boost in productivity and precision, allowing them to aggressively
ramp their capacity to high volume and high yield."
The Purion Platform
The Purion platform redefines the
ion implanter application space, delivering unmatched purity,
precision and productivity to enhance customers' device performance
and yield. On this platform, we've built the industry's
first complete implant product solution designed specifically for
advanced planar and 3D devices while providing the most flexible
and productive manufacturing capability for your fab. The systems'
common cross-product platform architecture is designed to drive
manufacturing flexibility and lower the total cost of fab
operations. All Purion implanters incorporate Axcelis' industry
leading Purion Contamination Shield™ Defense System, for
unsurpassed implant quality, so even the most sensitive devices can
realize optimized device performance. The platform's
proprietary Purion Vector™ dose and angle control system, and
constant focal length scanning deliver the most precise and
repeatable dopant placement available today. The
platform's superior beam current performance combined with the
Purion™ 500wph end station provides the industry's highest
productivity. The Purion platform includes the Purion M™ medium
current implanter, the Purion H™ high current implanter, and the
Purion XE™ high energy implanter.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for over 35 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.