ASML announces new high mark for EUV productivity;
February 23 2015 - 6:01PM
TSMC images more
than 1000 wafers in a single day
Media Relations Contacts
Lucas van Grinsven - Corporate Communications - +31 6 101 99 532 -
Veldhoven, the Netherlands
Niclas Mika - Corporate Communications - +31 6 201 528 63 -
Veldhoven, the Netherlands
Ryan Young - Corporate Communications - +1 480 205 8659 - Chandler,
AZ, USA
Investor Relations Contacts
Craig DeYoung - Investor Relations - +1 480 696 2762 - Chandler,
Arizona, USA
Marcel Kemp - Investor Relations - +31 40 268 6494 - Veldhoven, the
Netherlands
VELDHOVEN, Netherlands, 24 February
2015 - ASML Holding N.V.(ASML) today confirms that its customer,
Taiwan Semiconductor Manufacturing Company Limited (TSMC) has
successfully exposed more than 1000 wafers on an NXE:3300B EUV
system in a single day, an important step towards insertion of EUV
lithography in volume production of semiconductors.
"During a recent test run on an NXE:3300B EUV
system we exposed 1022 wafers in 24 hours with sustained power of
over 90 Watts," said Dr. Anthony Yen, R&D Director, TSMC, at
the 2015 SPIE Advanced Lithography Symposium. "We are pleased with
this result, as it shows us the potential of the system."
The NXE:3300B system is one of two such systems
currently at TSMC, and will be joined by two additional
to-be-shipped new NXE:3350B systems. TSMC has stated that it
intends to use EUV in production.
"The test run at TSMC demonstrates the capability
of the NXE:3300B scanner, and moves us closer to our stated target
of sustained output of 1000 wafers per day in 2015," said Hans
Meiling, Vice President Service and Product Marketing EUV at ASML.
"We must continue to increase source power, improve system
availability and show this result at multiple customers over
multiple days."
About ASML
ASML makes possible affordable microelectronics that improve the
quality of life. ASML invents and develops complex technology for
high-tech lithography machines for the semiconductor industry.
ASML's guiding principle is continuing Moore's Law towards ever
smaller, cheaper, more powerful and energy-efficient
semiconductors. Our success is based on three pillars: technology
leadership combined with customer and supplier intimacy, highly
efficient processes and entrepreneurial people. We are a
multinational company with over 70 locations in 16 countries,
headquartered in Veldhoven, the Netherlands. We employ more than
14,000 people on payroll and flexible contracts (expressed in full
time equivalents). Our company is an inspiring place where
employees work, meet, learn and share. ASML is traded on Euronext
Amsterdam and NASDAQ under the symbol ASML. More information about
ASML, our products and technology, and career opportunities is
available on: www.asml.com
Forward Looking
Statements
This document contains statements relating to certain EUV system
performance capability, productivity and targets, expected EUV
system shipments and use of system performance in production that
are forward-looking, including statements with respect to EUV
endurance test results. Forward-looking statements do not guarantee
future performance and involve risks and uncertainties. Actual
results may differ materially from projected results as a result of
certain risks and uncertainties. These risks and uncertainties
include the risk that future endurance tests do not confirm the
results discussed in this press release or that EUV systems does
not otherwise perform as expected. These forward-looking statements
are made only as of the date of this document. We do not undertake
to update or revise the forward-looking statements, whether as a
result of new information, future events or otherwise.
Link to Press Release
This
announcement is distributed by NASDAQ OMX Corporate Solutions on
behalf of NASDAQ OMX Corporate Solutions clients.
The issuer of this announcement warrants that they are solely
responsible for the content, accuracy and originality of the
information contained therein.
Source: ASML Holding via Globenewswire
HUG#1896456
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