Applied Materials Revolutionizes Etch With Breakthrough Selective Materials Technology
June 29 2016 - 7:30AM
Applied Materials, Inc. is revolutionizing etch technology with its
Applied Producer® Selectra™ system, the industry's first extreme
selectivity etch tool that introduces new materials engineering
capabilities for continued scaling of 3D logic and memory chips.
“One of the most significant hurdles in producing advanced chips
is to selectively remove a specific material without damaging other
exposed materials in the multi-layer device,” said Dr. Shankar
Venkataraman, vice president and general manager of Applied’s
Selective Removal Products Business Unit. “The Selectra system is
the latest innovation in our etch portfolio of differentiated
products, and creates new market opportunities by delivering the
extreme selectivity required to advance Moore’s Law.”
Advanced microchips featuring increasingly complex structures
and deep, narrow trenches are creating new manufacturing
challenges. One of these challenges is the inability of wet
chemistry to penetrate tiny structures; another is the removal of
unwanted materials without causing damage. The Selectra system’s
breakthrough process accesses the smallest spaces, delivering
unprecedented materials selectivity and atomic-level etch precision
for a wide variety of dielectric, metal and semiconductor films.
Its extensive range of processes and ability to achieve precisely
controlled residue- and damage-free materials removal targets an
expanding number of crucial etch applications for patterning,
logic, foundry, 3D NAND and DRAM. The system’s versatility allows
chipmakers to manufacture leading-edge 3D devices and to explore
new architectures, materials and integration options.
Selectra systems are in volume production at foundry, logic and
memory chipmakers, and demand is gaining momentum as customers
begin to manufacture their most advanced device designs.
Applied Materials, Inc. (Nasdaq:AMAT) is the leader in materials
engineering solutions used to produce virtually every new chip and
advanced display in the world. Our expertise in modifying materials
at atomic levels and on an industrial scale enables customers to
transform possibilities into reality. At Applied Materials, our
innovations make possible the technology shaping the future. Learn
more at www.appliedmaterials.com.
A photo accompanying this announcement is available at
http://www.globenewswire.com/NewsRoom/AttachmentNg/45421c5d-2e5e-4719-a8ec-bbd32a806ca8
Contact:
Kevin Winston (editorial/media) 408.235.4498
Michael Sullivan (financial community) 408.986.7977
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