MELVILLE, N.Y., Dec. 22, 2016 /PRNewswire/ -- Canon U.S.A., Inc., a leader in digital imaging, has
announced that its parent company, Canon Inc., has commenced sales
of a new "Grade 6" productivity upgrade option for its FPA‑6300ES6a
KrF semiconductor lithography equipment.1 With the
spread of the Internet-of-Things, big data and Artificial
Intelligence technology, the demand for semiconductor devices such
as large-volume memory and sensors is expected to grow in order to
keep up with ever-increasing volumes of data. Consequently, the
demand for semiconductor lithography equipment that offers
increased levels of productivity is also growing.
Since the launch of the FPA‑6300ES6a KrF scanner in April 2012, Canon has continuously developed
productivity-enhancing options, available as upgrades for existing
units that have earned praise and a reputation of high-reliability
from the market. When equipped with the newly available Grade 6
productivity upgrade option, the FPA‑6300ES6a reaches even higher
levels of productivity to meet user needs.
By increasing stage speed and optimizing control processes, the
new Grade 6 productivity upgrade option reduces exposure process
time and achieves the industry's highest-level2
throughput rate, 255 wafers per hour3, to respond to the
needs of chip manufacturers seeking reduced cost of
ownership.4 Additionally, by simply changing the process
mode, the equipment can balance productivity and overlay
performance levels to support chip manufacturing processes that
require a variety of overlay accuracies.
The upgraded models inherit the same high reputation and
reliability of the currently available FPA‑6300ES6a, to facilitate
a smooth upgrade for models currently in operation. Additionally,
downtime resulting from the upgrade process has been reduced,
minimizing impact on production schedules.
For more information on Canon U.S.A. and its industrial products, please
visit www.usa.canon.com/industrial.
About Canon U.S.A.,
Inc.
Canon U.S.A., Inc., is
a leading provider of consumer, business-to-business, and
industrial digital imaging solutions to the United States and to Latin America and the Caribbean (excluding Mexico) markets. With approximately
$31 billion in global revenue, its
parent company, Canon Inc. (NYSE: CAJ), ranks third overall in U.S.
patents granted in 2015† and is one of
Fortune Magazine's World's Most Admired Companies in 2016. Canon
U.S.A. is committed to the highest
level of customer satisfaction and loyalty, providing 100 percent
U.S.-based consumer service and support for all of the products it
distributes. Canon U.S.A. is
dedicated to its Kyosei philosophy of social and
environmental responsibility. In 2014, the Canon Americas
Headquarters secured LEED® Gold certification, a recognition for
the design, construction, operations and maintenance of
high-performance green buildings. To keep apprised of the latest
news from Canon U.S.A., sign up
for the Company's RSS news feed by visiting www.usa.canon.com/rss
and follow us on Twitter @CanonUSA. For media inquiries, please
contact pr@cusa.canon.com.
†Based on weekly patent counts issued by
United States Patent and Trademark Office.
1 A semiconductor lithography system that utilizes a
248 nm exposure wavelength laser generated by combining the noble
gas krypton (Kr) and the halogen gas fluoride (F).
2 Among same-class KrF scanners. As of December 14, 2016, based on a Canon survey of
published specifications.
3 The amount of 300m wafers exposed in one hour at 98
shots per wafer.
4 One indicator of the productivity of processes and
production equipment for semiconductor mass production lines.
For sales information/customer
support:
1-800-OK-CANON
Canon U.S.A. Web
site:
http://www.usa.canon.com
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SOURCE Canon U.S.A., Inc.