STMicroelectronics Establishes World’s
First “Lab-in-Fab” to Advance Adoption of Piezoelectric MEMS in
Singapore in Partnership with A*STAR and ULVAC
- Collaboration with A*STAR’s Institute of Microelectronics (IME)
and Japanese manufacturing tool vendor ULVAC, focuses on Piezo MEMS
technology
- First-of-its-kind concept aims to accelerate the transition
from proofs of concept to volume production, and advance the
adoption of piezoelectric (Piezo) MEMS in new applications like
AR/VR, medical, and 3D printing
- First wafers expected in Q2 2021, with volume production
forecast at the end of 2022.
Singapore, October 28, 2020 –
STMicroelectronics (NYSE: STM), a global
semiconductor leader serving customers across the spectrum of
electronics applications and a world leader in
Micro-Electromechanical Systems (MEMS) technology, announces a
collaboration with A*STAR’s IME, a research institute in Singapore,
and ULVAC, a leading Japanese manufacturing-tool vendor, to jointly
setup and operate an 8-inch (200mm) R&D line focused on Piezo
MEMS technology within ST’s existing manufacturing facility in
Singapore. The first of its kind in the world, this “Lab-in-Fab”
R&D line brings together three partners with leading-edge and
complementary competencies in Piezo materials, Piezo MEMS
technologies, and wafer-fab tools to boost innovation and
accelerate development of new materials, process technologies, and
ultimately, products for industry customers.
The Lab-in-Fab consists of a new cleanroom area within ST’s Ang
Mo Kio campus and will host tools and dedicated resources from the
three parties, which include MEMS R&D and process scientists
and engineers. IME’s knowledge base and industrial drive in
piezo-MEMS device design, process integration, and system
integration will add value to the development of the line. IME will
also contribute state-of-the-art tools to help ensure a smooth
product flow through to production, all within the same location.
The new R&D line will also leverage existing ST resources,
benefiting from the economies of scale of ST’s wafer fabs on the
same campus. The “Lab-in-Fab” facility is forecast to be ready and
operational with first wafers in Q2 2021 and volume production at
the end of 2022.
“We want to build the world’s leading R&D center for Piezo
MEMS materials, technologies, and products with IME and ULVAC, with
whom we have been working for a long time. This world first will be
hosted in our Singapore site, a strategic location for ST,” said
Benedetto Vigna, President, Analog, MEMS and Sensors Group,
STMicroelectronics. “The Lab-in-Fab will offer our customers the
capability to more easily go from a feasibility study to product
development and high-volume manufacturing.”
This collaboration enhances the existing manufacturing-process
portfolio of ST Singapore and will accelerate the adoption of Piezo
MEMS actuators in promising new fields of application, including
MEMS Mirrors for Smart Glasses, AR Headsets and LIDAR systems,
Piezoelectric Micromachined Ultrasonic Transducers (PMUT) for
emerging medical applications, and Piezo Heads for Commercial and
industrial 3-D Printing.
“The public-private partnership between IME, ST and ULVAC has
led to the creation of a unique R&D line, which will bring
about novel products using piezo materials, and boost the
competitiveness of our partners. These efforts will continue to
anchor high-value R&D activities in Singapore and demonstrate
that Singapore continues to be an attractive environment for
industry leaders to innovate and grow their businesses. A*STAR is
also committed to helping local SMEs tap into our technologies. We
welcome companies to collaborate with IME and leverage our
Lab-in-Fab facilities for proof of concept,” said Prof. Dim-Lee
Kwong, Executive Director of IME.
“We are proud of being a “Lab-in-Fab” partner of ST and IME in
developing advanced Piezo-MEMS for numerous promising future
applications. This is also a strong proof of ULVAC’s leadership in
providing manufacturing technology solutions to the Piezo-MEMS
industry. We are looking forward to working closely with our
partners for a successful collaboration,” said Dr. Koukou SUU,
Executive Officer and Senior Fellow of ULVAC.
Note to editors
Piezo-based components have been widely used for decades to
build actuators or sensors out of bulk piezo material. Over the
past years, innovations in process technologies have allowed the
MEMS industry to design and manufacture products at the wafer level
using thin piezo films, opening the door for continued
miniaturization, performance improvements, and cost reduction.
The “Lab-in-Fab” facility comes a year after ST celebrated its
50th anniversary in Singapore in 2019, in conjunction with the
opening of its brand new 8-inch (200mm) wafer fabrication facility
(SG8E) in Singapore.
About STMicroelectronicsAt ST, we are 46,000
creators and makers of semiconductor technologies mastering the
semiconductor supply chain with state-of-the-art manufacturing
facilities. An independent device manufacturer, we work with our
100,000 customers and thousands of partners to design and build
products, solutions, and ecosystems that address their challenges
and opportunities, and the need to support a more sustainable
world. Our technologies enable smarter mobility, more efficient
power and energy management, and the wide-scale deployment of the
Internet of Things and 5G technology. Further information can be
found at www.st.com.
About the Institute of Microelectronics (IME)
The Institute of Microelectronics (IME) is a research institute of
the Agency for Science, Technology and Research (A*STAR).
Positioned to bridge the R&D between academia and industry,
IME's mission is to add value to Singapore's semiconductor industry
by developing strategic competencies, innovative technologies and
intellectual property; enabling enterprises to be technologically
competitive; and cultivating a technology talent pool to inject new
knowledge to the industry. Its key research areas are in
Heterogeneous Integration, System-in-Package, Sensor, Actuators and
Microsystems, RF & mmWave, SiC/GaN-on-SiC Power Electronics,
and MedTech. For more information on IME, please visit
www.ime.a-star.edu.sg.
About ULVACULVAC, Inc., founded in 1952,
contributes to the development of industry through its
comprehensive vacuum technologies. We created ULVAC SOLUTIONS based
on these unique technologies and long years of research,
development and production innovation. We offer these solutions,
for equipment, materials, vacuum components, analytic evaluation
and various other services, to manufacturers of electronic
components, semiconductors, solar cells, flat panel displays and
other industrial equipment. For more information, please visit
www.ulvac.co.jp/en/.
For Press Information Contact:
Mr. Dennis TanManager, Integrated Marketing & Communications
STMicroelectronics Tel: +65 6216 5598 Email:
wddennis.tan@st.com
Ms. Lydia SumAssistant Head, Corporate Communications, A*STAR
Tel: +65 9825 3600 Email: sumcll@hq.a-star.edu.sg
ULVAC, Inc. Advanced Electronics Equipment Division TEL: +81 467
89 2139 Email: elec@ml.ulvac.com
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