FORM 3
        
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

OMB APPROVAL
OMB Number: 3235-0104
Estimated average burden
hours per response...
0.5
                      
Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
                      
1. Name and Address of Reporting Person * Harlow James 2. Date of Event Requiring Statement (MM/DD/YYYY)
10/1/2021 

3. Issuer Name and Ticker or Trading Symbol ONTO INNOVATION INC. [ONTO]
(Last)       (First)       (Middle)
C/O ONTO INNOVATION INC., 16 JONSPIN ROAD
4. Relationship of Reporting Person(s) to Issuer (Check all applicable)_____ Director                          _____ 10% Owner
_____ Officer (give title below)        ___X___ Other (specify below)
/ Chief Operating Officer
(Street)
WILMINGTON, MA 01887      
(City)             (State)             (Zip)
5. If Amendment, Date Original Filed(MM/DD/YYYY)
 

6. Individual or Joint/Group Filing(Check Applicable Line)_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)
2. Amount of Securities Beneficially Owned
(Instr. 4)
3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)
4. Nature of Indirect Beneficial Ownership
(Instr. 5)

Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivate Security
(Instr. 4)
2. Date Exercisable and Expiration Date
(MM/DD/YYYY)
3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)
4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)
6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares

Explanation of Responses:
No securities are beneficially owned.

Reporting Owners
Reporting Owner Name / Address
Relationships
Director 10% Owner Officer Other
Harlow James
C/O ONTO INNOVATION INC.
16 JONSPIN ROAD
WILMINGTON, MA 01887



Chief Operating Officer

Signatures
By: /s/ Robert A. Koch For: James Harlow 10/5/2021
**Signature of Reporting Person Date
Onto Innovation (NYSE:ONTO)
Historical Stock Chart
From Apr 2022 to May 2022 Click Here for more Onto Innovation Charts.
Onto Innovation (NYSE:ONTO)
Historical Stock Chart
From May 2021 to May 2022 Click Here for more Onto Innovation Charts.