FORM 3
        
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549
INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

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Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
                      
1. Name and Address of Reporting Person * Vedula Srinivas 2. Date of Event Requiring Statement (MM/DD/YYYY)
8/30/2021 

3. Issuer Name and Ticker or Trading Symbol ONTO INNOVATION INC. [ONTO]
(Last)       (First)       (Middle)
C/O ONTO INNOVATION INC., 16 JONSPIN ROAD
4. Relationship of Reporting Person(s) to Issuer (Check all applicable)_____ Director                          _____ 10% Owner
_____ Officer (give title below)        ___X___ Other (specify below)
/ Sr VP, Customer Success Group
(Street)
WILMINGTON, MA 01887      
(City)             (State)             (Zip)
5. If Amendment, Date Original Filed(MM/DD/YYYY)
 

6. Individual or Joint/Group Filing(Check Applicable Line)_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person

Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)
2. Amount of Securities Beneficially Owned
(Instr. 4)
3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)
4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock  20416 (1) D   

Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivate Security
(Instr. 4)
2. Date Exercisable and Expiration Date
(MM/DD/YYYY)
3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)
4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)
6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares

Explanation of Responses:
(1)  Includes shares issuable pursuant to 10,457 restricted stock units and 3,734 shares held in the Issuer's Employee Stock Purchase Plan. Each restricted stock unit represents a contingent right to receive one share of ONTO common stock.

Reporting Owners
Reporting Owner Name / Address
Relationships
Director 10% Owner Officer Other
Vedula Srinivas
C/O ONTO INNOVATION INC.
16 JONSPIN ROAD
WILMINGTON, MA 01887



Sr VP, Customer Success Group

Signatures
By: /s/ Robert A. Koch For: Srinivas Vedula 9/1/2021
**Signature of Reporting Person Date
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