SCREEN Semiconductor Solutions Partners with Taiwan's National Tsing Hua University to Establish E-Beam Direct Write Lithogra...
April 24 2018 - 5:55AM
Business Wire
On April 20, 2018, SCREEN Semiconductor Solutions Co., Ltd.
(SCREEN) signed a memorandum of understanding (MoU) with National
Tsing Hua University (NTHU) in a ceremony commemorating the launch
of the massively E-beam direct write lithography for 12 inch Si
wafers (MEB12) program.
NTHU combined with international semiconductor equipment and
software suppliers will establish the first massively electron beam
direct writing (MEBDW) innovative semiconductor industry-university
alliance to develop the state-of-the-art maskless lithography
technology. The MEBDW lithography technology enables “on-chip
security”, making Taiwan the world’s first development and pilot
production for security chips with unique IDs, providing
information security for the Internet, AI, electronic payment and
automotive chips.
The MEB12 program participants include the world’s only
commercial MEBDW lithography equipment manufacturer, Mapper
Lithography B.V., from the Netherlands and U.S. design software
supplier Synopsys, Inc. SCREEN will support the MEB12 program with
both DUO lithography coat/develop track and SU-3200 single wafer
cleaning systems.
As one of the MEB12 project initiators, Professor Po-Wen Chiu of
NTHU’s Department of Electrical Engineering and chairman of the
Center for Nanotechnology, Materials Science, and Microsystems,
pointed out: “This project is a successful case to use Taiwan’s
strong penetration capability in the semiconductor manufacturing
sector, to form an alliance with international semiconductor giants
and build up the most advanced commercial 12 inch MEBDW lithography
process line in the campus, making NTHU the world’s first
university to have this unique R&D capability.”
“We are very pleased to be supporting NTHU in Taiwan as they
pioneer the MEB12 alliance,” noted Tadahiro Suhara, president of
SCREEN Semiconductor Solutions. “This is a testament to the value
our SCREEN equipment technology and resources bring to innovative
IoT applications.”
The MEB12 alliance will allow Taiwan and neighboring Asian
semiconductor IC design and manufacturing companies to join the
alliance with membership and jointly develop the innovative chips.
According to Professor Chiu, “In addition to developing security
chips, it can also be used as a maskless IC design verification
platform which survives the start-up IC design companies by
significantly reducing the soaring costs derived from the
photomasks, and a low cost foundry service with high resolution and
high graphic-flexibility for the niche applications.”
About National Tsing Hua University (NTHU)
National Tsing Hua University was established in Beijing in 1911
as Tsing Hua Academy. In 1956, National Tsing Hua University was
re-established at its present location in Hsinchu, Taiwan. Since
its relocation, NTHU has developed into a comprehensive research
university offering a full range of degree programs in science,
technology, engineering, humanities, social sciences and
management. NTHU consistently ranks as one of the premier
universities in East Asia and is widely recognized as a leading
incubator for future leaders. For more information on NTHU, please
visit http://nthu-en.web.nthu.edu.tw.
About SCREEN Semiconductor Solutions Co., Ltd.
SCREEN Semiconductor Solutions has been established as a group
company of SCREEN Holdings, inheriting the semiconductor equipment
business from its predecessor, Dainippon Screen. SCREEN is a
specialized manufacturer in various areas such as wafer cleaning
equipment, lithography equipment and thermal anneals, and is one of
the world’s top 10 equipment suppliers to the semiconductor
manufacturing industry. For more information, please visit
http://www.screen.co.jp/eng/spe.
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version on businesswire.com: https://www.businesswire.com/news/home/20180424005735/en/
SCREEN Semiconductor Solutions Co., Ltd.Charles Pieczulewski /
Hiroaki Sugimoto, +81-75-417-2527speinfo@screen.co.jp