Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced semiconductor processing equipment, today announced that a major CMOS image sensor (CIS) manufacturer has accepted the paradigmE etch system, which was shipped in the fourth quarter of 2011, for use in its production facility.

Increasing demand for CIS technology is driven by the ever-increasing use of cameras in mobile handsets, tablet PCs, notebook PCs and automobiles. The requirement for image sensors with higher resolution and image quality with reduced power consumption is driving the industry's shift from the use of charge coupled device (CCD) array technology to CIS. Over 90% of image sensor unit shipments in 2011 were CIS devices, and market research firm IHS iSupply estimates that CIS unit shipments will grow up to 97% by 2015.

"Bolstered by their use in mobile handsets and an ever-growing number of other devices and applications, CIS devices have become the dominant technology," said Rene George, vice president and general manager of Mattson Technology's Plasma Products Group. "Mattson's position in this market segment is an important part of continuing our etch market share growth. The acceptance of our paradigmE system, which is already established in the DRAM, NAND and foundry/logic segments, extends our advanced etch technology into the CIS market. The paradigmE will continue to deliver the excellent processing performance, high productivity and low cost-of-ownership our customers require to ramp their production of advanced devices to serve the mobile electronics market."

About Mattson Technology, Inc. Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON / (510) 657-5900. Internet: www.mattson.com.

"Safe Harbor" Statement Under the Private Securities Litigation Reform Act of 1995: This news release contains forward-looking statements. All statements other than statements of historical fact are statements that could be deemed forward-looking statements, including but not limited to statements of the plans, strategies and objectives of management for future operations. Forward-looking statements address matters that are subject to a number of risks and uncertainties that can cause actual results to differ materially from those expressed or implied by such forward-looking statements and assumptions. Such risks and uncertainties include, but are not limited to: macroeconomic and geopolitical trends and events; end-user demand for semiconductors; customer demand for semiconductor manufacturing equipment; the timing of significant customer orders for the Company's products; customer acceptance of delivered products and the Company's ability to collect amounts due upon shipment and upon acceptance; the Company's ability to timely manufacture, deliver and support ordered products; the Company's ability to bring new products to market and to gain market share with such products; customer rate of adoption of new technologies; risks inherent in the development of complex technology; the timing and competitiveness of new product releases by the Company's competitors; the Company's ability to align its cost structure with market conditions; and other risks and uncertainties described in the Company's Forms 10-K, 10-Q and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update the information provided in this news release.

Mattson Technology Contact Lauren Vu Mattson Technology, Inc. tel +1-510-492-6250 fax +1-510-492-5914 lauren.vu@mattson.com Investor Contact Laura Guerrant-Oiye Guerrant Associates tel +1-808-882-1467 lguerrant@guerrantir.com

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