Entegris EUV 1010 Reticle Pod Demonstrates Superior Defectivity Performance and Receives ASML Qualification
August 21 2018 - 03:26PM
Business Wire
New Entegris EUV 1010 Reticle Pod demonstrates
low defectivity, enabling the high-volume manufacturing of advanced
technology nodes using EUV lithography
Entegris, Inc. (NASDAQ: ENTG), a leader in specialty chemicals
and advanced materials solutions for the microelectronics industry,
today released the next generation EUV 1010 Reticle Pod for
high-volume IC manufacturing using extreme ultraviolet (EUV)
lithography. Developed in close collaboration with ASML, one of the
world’s largest manufacturers of chip-making equipment, Entegris’s
EUV 1010 is the first to be qualified by ASML for use in the
NXE:3400B and beyond.
As the semiconductor industry begins ramping EUV lithography for
the high-volume manufacturing (HVM) of advanced technology nodes,
keeping EUV reticles defect-free is more demanding than ever.
Entegris’s EUV 1010 Reticle Pod is now fully qualified by ASML for
their latest generation scanner having demonstrated outstanding
protection of the EUV reticles, including against the most critical
particle challenges. As a result, Entegris’s EUV 1010 enables
customers to safely transition to smaller and smaller line widths,
as needed for the most advanced lithography processes.
To achieve these levels of performance within the NXE:3400B
scanner, Entegris developed new technologies for contacting the
reticles and controlling the environment. “The Entegris EUV 1010
represents a significant breakthrough in improving defectivity so
customers implementing HVM for advance technology nodes can focus
on increasing efficiency and throughput,” said Paul Magoon, vice
president of wafer and reticle handing for Entegris. “Development
and testing with ASML ensures that EUV 1010 has been qualified for
the most advanced EUV scanner available.”
ABOUT ENTEGRIS
Entegris is a leader in specialty chemicals and advanced
materials solutions for the microelectronics industry and other
high-tech industries. Entegris is ISO 9001 certified and has
manufacturing, customer service and/or research facilities in the
United States, China, France, Germany, Israel, Japan, Malaysia,
Singapore, South Korea and Taiwan. Additional information can be
found at www.entegris.com.
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version on businesswire.com: https://www.businesswire.com/news/home/20180821005651/en/
Entegris, Inc.Kitty Xu, +86 21 80236591Asia Marketing
Director
Entegris (NASDAQ:ENTG)
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