MELVILLE, N.Y., Dec. 22, 2016 /PRNewswire/ -- Canon U.SA.,
Inc., a leader in digital imaging solutions, has announced that its
parent company, Canon Inc., has commenced sales of the FPA‑5550iZ2,
a successor to the FPA‑5550iZ i‑line semiconductor lithography
system or "stepper"1 that is known for its stable
operation and productivity. The FPA‑5550iZ2 is suitable for
manufacturing logic, memory and CMOS image sensor devices and is
designed to achieve even greater productivity and overlay accuracy
when compared to its predecessor.
Two paths to continued growth in the semiconductor industry have
been circuit scaling or miniaturization and increasing wafer
diameters to realize reduced chip-production costs and improved
device performance. However, as the rate of scaling slows, demand
has increased for semiconductor lithography systems that realize
even greater productivity than those currently available. Scaling
challenges have also driven pursuit of high levels of system
integration and the development of devices that employ alternative
structures, such as 3D NAND flash memory, that demand semiconductor
lithography systems that support a variety of processes. The
FPA‑5550iZ2 inherits the stable operation of its predecessor and
through its capacity for modification, allows for continuous
upgrades to its enhanced platform that support the development of a
variety of different solutions to meet diverse user needs.
Achieving High Levels of Productivity and Overlay
Accuracy
The FPA‑5550iZ2 realizes a high level of
productivity (wafer-processing ability) by reducing
wafer-processing time through sequence optimization and reducing
wafer lot overhead time. Equipped with the proprietary Canon SSC
(Shot Shape Compensator) projection optical system, the FPA‑5550iZ2
can correct for intrafield XY magnification differences and
skew.2 The enhanced intrafield correction capability of
the FPA‑5550iZ2 provides a high level of overlay accuracy when
matching to existing fields on wafer.
Supporting Various Solutions for Logic, Memory and Image
Sensor Devices
With the advent of the age of the
internet-of-things, artificial intelligence and big data, there is
an increasing demand for large-capacity storage devices.
Additionally, the development of technologies, such as driverless
cars and driver assistance systems has resulted in an increase in
demand for high-sensitivity image and position sensors. Depending
on the process required, the FPA‑5550iZ2 can be equipped with
optional solutions that meet a variety of process needs. In
addition to realizing high-productivity and overlay accuracy
necessary to manufacture next-generation devices, the FPA‑5550iZ2
includes solutions for color-filter processes that were developed
for earlier FPA‑5510iZ and FPA‑5510iZs steppers.
For more information on Canon U.S.A. and its industrial products, please
visit www.usa.canon.com/industrial.
About Canon U.S.A.,
Inc.
Canon U.S.A., Inc., is
a leading provider of consumer, business-to-business, and
industrial digital imaging solutions to the United States and to Latin America and the Caribbean (excluding Mexico) markets. With approximately
$31 billion in global revenue, its
parent company, Canon Inc. (NYSE: CAJ), ranks third overall in U.S.
patents granted in 2015† and is one of Fortune
Magazine's World's Most Admired Companies in 2016. Canon
U.S.A. is committed to the highest
level of customer satisfaction and loyalty, providing 100 percent
U.S.-based consumer service and support for all of the products it
distributes. Canon U.S.A. is
dedicated to its Kyosei philosophy of social and
environmental responsibility. In 2014, the Canon Americas
Headquarters secured LEED® Gold certification, a recognition for
the design, construction, operations and maintenance of
high-performance green buildings. To keep apprised of the latest
news from Canon U.S.A., sign up
for the Company's RSS news feed by visiting www.usa.canon.com/rss
and follow us on Twitter @CanonUSA. For media inquiries, please
contact pr@cusa.canon.com.
†Based on weekly patent counts issued by United
States Patent and Trademark Office.
1 A semiconductor lithography system that utilizes a
365 nm wavelength mercury lamp as the light source. 1nm (nanometer)
is 1 billionth of a meter.
2 Shots with diagonally oriented distortion
Canon U.S.A. Web
site:
http://www.usa.canon.com
For sales information/customer
support:
1-800-OK-CANON
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SOURCE Canon U.S.A., Inc.