MELVILLE, N.Y., July 14, 2016 /PRNewswire/ -- Canon U.S.A., Inc., a leader in digital imaging
solutions, has announced that its parent company, Canon Inc., has
launched sales of the new FPA-3030EX6 KrF excimer laser
stepper1 designed to enable analog chips, sensors and
communication devices to harness the power of the Internet of
Things (IoT).
With the dawn of the IoT, in addition to PCs and smartphones,
cars, appliances, industrial equipment, all manner of "things" will
be equipped with sensors and communication devices that allow them
to connect to the internet to send and receive data. Canon,
anticipating the expansion of the market for such devices, has
begun sales of the FPA-3030EX6 for the production of analog
semiconductors, sensors and communication devices.
The KrF excimer laser stepper, which accommodates small-sized
substrates with diameters of 200mm or less, inherits the
functionality of its predecessor, the FPA-3000EX6, while also
offering compatibility with special substrates used in the
fabrication of a multitude of devices to meet the diverse needs of
semiconductor manufacturers.
The fabrication of IoT-related devices and power devices
involves a variety of substrate materials including silicon,
sapphire, silicon carbide and glass, as well as varying wafer
diameters and thicknesses. Sharing the same wafer feeding system as
the FPA-3030i5+ i-line stepper2 (released in
June 2012), with a proven track
record handling special and small-sized substrates, the FPA-3030EX6
is capable of handling a variety of substrate types.
The new stepper delivers one of the highest levels3
of resolution, overlay accuracy and productivity (throughput) among
KrF excimer laser steppers in the same class. The FPA-3030EX6
platform uses the same reticle and recipe as the FPA-3000EX6,
making possible the effective utilization of existing equipment and
assets.
About Canon U.S.A.,
Inc.
Canon U.S.A., Inc., is a leading provider of
consumer, business-to-business, and industrial digital imaging
solutions to the United States and
to Latin America and the
Caribbean (excluding Mexico) markets. With approximately
$31 billion in global revenue, its
parent company, Canon Inc. (NYSE:CAJ), ranked third overall in U.S.
patents granted in 2015† and is one of Fortune Magazine's World's
Most Admired Companies in 2016. Canon U.S.A. is committed to the highest level of
customer satisfaction and loyalty, providing 100 percent U.S.-based
consumer service and support for all of the products it
distributes. Canon U.S.A. is
dedicated to its Kyosei philosophy of social and
environmental responsibility. In 2014, the Canon Americas
Headquarters secured LEED® Gold certification, a recognition for
the design, construction, operations and maintenance of
high-performance green buildings. To keep apprised of the latest
news from Canon U.S.A., sign up
for the Company's RSS news feed by visiting www.usa.canon.com/rss
and follow us on Twitter @CanonUSA.
† Based on weekly patent counts issued by United States Patent
and Trademark Office.
1 A semiconductor lithography system that utilizes a
248 nm exposure wavelength laser generated by combining the noble
gas krypton (Kr) and the halogen gas fluoride (F).
2 A semiconductor lithography system that utilizes a
365 nm wavelength mercury lamp as the light source.
3 As of July 4, 2016,
based on a Canon survey.
All referenced product names, and other marks, are trademarks of
their respective
owners.
Actual prices set by dealers, and may vary. Availability dates
are subject to change without notice.
Canon U.S.A.
website:
http://www.usa.canon.com
For sales information/customer
support:
1-800-OK-CANON
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SOURCE Canon U.S.A., Inc.