LEHIGH VALLEY, Pa.,
Sept. 8, 2016 /PRNewswire/
-- Dr. Bob Ridgeway, group
leader for PECVD and FCVD Applications at Versum Materials, will
deliver a presentation at the IC Forum of SEMICON Taiwan on
September 9, 2016, entitled,
"Development of a Porous low-k Precursor to Provide Enhanced
Mechanical Properties without Sacrificing Carbon Content."
Scheduled for 3:10 p.m., in Room
401 of Hall 1, Ridgeway's presentation will be based on a recent
detailed investigation which he co-authored with Versum colleagues
William R. Entley, Jennifer L. Achtyl, Raymond N. Vrtis and Jianheng Li. His talk will focus on a novel
silicon-containing precursor that balances the higher mechanical
strength associated with low-carbon films with the improved
resistance to plasma induced damage (PID) typically associated with
high-carbon films. By leveraging our long-standing expertise, a
unique offering has been developed that continues to strengthen our
marketing leading position in the low-k space. Through plasma
enhanced chemical vapor deposition and UV curing, the deposited
films have improved mechanical properties by incorporation of
carbon bridging in the porous low-k network with reduced PID
compared to films deposited only for mechanical strength
enhancement.
The presentation will also provide empirical modeling results
allowing the selection of operating conditions using the novel
precursor to achieve specific films property targets related to
dielectric constant, elastic modulus, hardness and PID. All work
described in the paper was performed on an industry-relevant
platform using 300mm wafers.
The presentation will be part of Versum's presence at SEMICON
Taiwan show, where the company will publicly introduce its new
identity ahead of the spin-off of Versum Materials from Air
Products planned for October 2016.
Versum will showcase, in Booth #138 - 4th Floor, the innovative
products and services that make the company one of the
semiconductor industry's largest and most respected suppliers.
Information on the products and services displayed at the show
will be available at www.airproducts.com/semicon.
About Air Products
Air Products (NYSE: APD) is a
world-leading Industrial Gases company celebrating 75 years of
operation. The company's core Industrial Gases business provides
atmospheric and process gases and related equipment to
manufacturing markets, including refining and petrochemical,
metals, electronics, and food and beverage. Air Products is also
the world's leading supplier of liquefied natural gas process
technology and equipment. The company's Materials Technologies
business serves the semiconductor, polyurethanes, cleaning and
coatings, and adhesives industries.
The company had fiscal 2015 sales of $9.9
billion and has a current market capitalization of more than
$30 billion. Approximately 19,000
employees in 50 countries strive to make Air Products the world's
safest and best performing Industrial Gases company, providing
sustainable offerings and excellent service to all customers. For
more information, visit www.airproducts.com.
About Versum Materials
Versum Materials, Inc.
(versummaterials.com) is a best-in-class electronic materials
company providing high-purity chemicals and gases, delivery
systems, services and materials expertise to meet the evolving
needs of the global semiconductor, display and LED markets. Derived
from the Latin word for "toward," the name "Versum" communicates
the company's deep commitment to helping customers move toward the
future by collaborating, innovating and creating cutting-edge
solutions. A global leader in technology, quality, safety and
reliability, Versum is one of the world's largest suppliers of next
generation CMP slurries, ultra-thin dielectric and metal film
precursors, formulated cleans and etching products, and delivery
equipment that has revolutionized the semiconductor industry.
Versum Materials is expected to spin off from Air Products in
October 2016, and will have annual
sales of about US$1 billion. With
more than 1,900 employees operating in over 10 production
facilities and six R&D and technical centers, Versum Materials
has the scale and breadth to support customers globally.
NOTE: This news release contains "forward-looking statements"
within the safe harbor provisions of the Private Securities
Litigation Reform Act of 1995 including statements about the
Company's plans for completion of the spin-off, the expected
benefits of the spin-off, the tax free nature of the spin-off, the
prospects for the independent companies following the spin-off and
the timing of the transaction. These forward-looking statements are
based on management's reasonable expectations and assumptions as of
the date of this release. Actual results may differ materially from
the expectations expressed in the forward-looking statements
because of many factors not anticipated by management, including,
without limitation, our ability to obtain regulatory approvals, Air
Products' decision not to consummate the spin-off due to market,
economic or other events; our ability to fully realize the
anticipated benefits of the spin-off; negative effects of the
announcement or the consummation of the proposed spin-off on the
market price of the company's common stock; significant transaction
costs and or unknown liabilities; general economic and business
conditions that affect the companies in connection with the
proposed spin-off; changes in capital market conditions; future
opportunities that the Company's board may determine present
greater potential to increase shareholder value, the ability of our
companies to operate independently following the spin-off; and
other risk factors described in the Company's Form 10-K for its
fiscal year ended September 30, 2015.
The Company disclaims any obligation or undertaking to disseminate
any updates or revisions to any forward-looking statements
contained in this document to reflect any change in assumptions,
beliefs or expectations or any change in events, conditions, or
circumstances upon which any such forward-looking statements are
based.
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SOURCE Air Products