Cymer Announces Shipment of its First XLR 700ix DUV Light Source and Introduces DynaPulse
February 23 2015 - 11:00AM
DynaPulse provides extendibility
and leading-edge capabilities to the ArF immersion installed base
to further maximize chipmakers' investment
San Jose, California, February 23,
2015 - Cymer, an ASML company, an industry leader in developing
lithography light sources used by chipmakers to pattern advanced
semiconductor chips, today announced the shipment of its first
XLR® 700ix light
source. Enabling higher scanner throughput and process stability
for 14nm chip manufacturing and beyond, the XLR 700ix provides
improvements in bandwidth, wavelength and energy stability to
reduce process variability and increase yield through improvements
in wafer critical dimension (CD) uniformity; software enhancements
to increase light source predictability and availability; and
reduction in helium and power consumption to decrease operating
costs.
Cymer also introduced DynaPulse(TM) as a product
upgrade option for OnPulse® customers.
DynaPulse enables chipmakers to extend their capital investment and
achieve the same performance improvements standard in the XLR 700ix
to their ArF immersion installed base. Essentially eliminating
bandwidth as a source of variation to improve on-wafer critical
dimension (CD) uniformity, the XLR 700ix and DynaPulse utilize the
same patented technology to tightly control bandwidth
specifications (300+5fm) and achieve stable on-wafer
performance.
"Customers have recognized the new performance,
process stability and sustainability improvements of the XLR 700ix
to enable higher system efficiency for leading-edge manufacturing
applications, and are eager to realize the same benefits within
their installed base," said Ed Brown, Chief Executive Officer of
Cymer Light Source. "DynaPulse now makes it easier for chipmakers
to achieve a high level of performance and productivity across
their entire ArF immersion light source fleet."
From enhanced service to product upgrade options,
such as SmartPulse(TM) and DynaPulse, OnPulse customers experience
reduced cost of operation, enhanced productivity and predictable
costs that scale directly with wafer production. For example, the
SmartPulse data capture and analysis tool enables chipmakers to
better monitor key light source parameters in real-time, with
field-to-field resolution, prevent excursions and make adjustments
to achieve a high level of performance, and ultimately increase
wafer output per tool. SmartPulse enables chipmakers to better
monitor and keep light sources within tighter bandwidth control
achieved with DynaPulse.
As the newest additions to the family, XLR 700ix
and DynaPulse demonstrate Cymer's continued investment in research
and development to support DUV technology extensions for 14nm chip
manufacturing and beyond.
About Cymer
Cymer, an ASML company, is an industry leader in developing
lithography light sources, used by chipmakers worldwide to pattern
advanced semiconductor chips. Cymer's light sources, and ongoing
innovations, are available to all semiconductor and semiconductor
equipment companies to enable advanced device manufacturing today
and into the future. Cymer is pioneering the industry's transition
to EUV light source technology, the next viable step on the
technology roadmap for the creation of smaller, faster and more
energy-efficient chips. The company is headquartered in San Diego,
California. www.cymer.com
About ASML
ASML makes possible affordable microelectronics that improve the
quality of life. ASML invents and develops complex technology for
high-tech lithography machines for the semiconductor industry.
ASML's guiding principle is continuing Moore's Law towards ever
smaller, cheaper, more powerful and energy-efficient
semiconductors. Our success is based on three pillars: technology
leadership combined with customer and supplier intimacy, highly
efficient processes and entrepreneurial people. We are a
multinational company with over 70 locations in 16 countries,
headquartered in Veldhoven, the Netherlands. We employ more than
14,000 people on payroll and flexible contracts (expressed in full
time equivalents). Our company is an inspiring place where
employees work, meet, learn and share. ASML is traded on Euronext
Amsterdam and NASDAQ under the symbol ASML. More information about
ASML, our products and technology, and career opportunities is
available on: www.asml.com
Cautionary Statement Regarding
Forward-Looking Statements
"This document contains statements that are forward-looking,
including statements with respect to Cymer's XLR 700ix DUV light
source, including expected benefits to our customers, expected
benefits of Cymer's XLR 700ix DUV light source, including reducing
process variability and increase yield through improvements in
wafer critical dimension (CD) uniformity, expected improvements in
bandwidth, wavelength and energy stability and expected
improvements in scanner throughput and process stability,
statements with respect to bandwidth control and expected benefits
therefrom, including reduction in process incursions and stable and
repeatable performance, statements with respect to sustainable use
of natural resources, including use of less helium and reduced
energy requirements, and resulting reduced operating costs for
customers, statements with respect to software updates that enhance
light source predictability and availability and statements with
respect to Cymer's DynaPulse, including expected benefits to our
customers and expected performance improvements to and extended
lifespan of ArF immersion installed bases.
You can generally identify these statements by the use of words
like "may", "will", "could", "should", "project", "believe",
"anticipate", "expect", "plan", "estimate", "forecast",
"potential", "intend", "continue" and variations of these words or
comparable words. These statements are not historical facts, but
rather are based on current expectations, estimates, assumptions
and projections about the business and our future financial results
and readers should not place undue reliance on them.
Forward-looking statements do not guarantee future performance and
involve risks and uncertainties. These risks and uncertainties
include risks associated with Cymer's XLR 700ix DUV light
source, including the risks that the light source does not deliver
expected results or benefits to our customers, risks associated
with Cymer's DynaPulse, including the risks that the product
upgrade option does not deliver expected results or benefits to our
customers and other risks indicated in the risk factors included in
ASML's Annual Report on Form 20-F and other filings with the US
Securities and Exchange Commission. These forward-looking
statements are made only as of the date of this document. We do not
undertake to update or revise the forward-looking statements,
whether as a result of new information, future events or
otherwise.
Link to Press Release
This
announcement is distributed by NASDAQ OMX Corporate Solutions on
behalf of NASDAQ OMX Corporate Solutions clients.
The issuer of this announcement warrants that they are solely
responsible for the content, accuracy and originality of the
information contained therein.
Source: ASML Holding via Globenewswire
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