BEVERLY, Mass., April 1, 2015 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today that it has received follow-on Purion H™
orders from one of the world's leading manufacturers of DRAM
devices in the Asia Pacific
region. The order will result in multiple fabs, each receiving
multiple Purion H high current tools in Q2. The systems will be
used to support a continued capacity expansion for next generation
memory devices.
"This win is indicative of the advantages the Purion H provides
for next generation planar and 3D device manufacturing, especially
for materials modification implants," said John Aldeborgh, executive vice president,
customer operations. "The Purion's innovative scanned spot
beam is the only technology available today specifically designed
to support these new applications by taking precision process
control to the next level to enhance device yield, while providing
the industry's highest level of productivity. These emerging
applications provide significant growth opportunities for Axcelis,
especially in the high current segment."
The Power of Purion
The Purion platform redefines the
ion implanter application space, delivering unmatched purity,
precision and productivity to enhance customers' device performance
and yield. On this platform, Axcelis has built the
industry's first complete implant product solution designed
specifically for advanced planar and 3D devices while providing the
most flexible and productive manufacturing capability for our
customers. The systems' common cross-product platform architecture
is designed to drive manufacturing flexibility and lower the total
cost of fab operations. All Purion implanters incorporate Axcelis'
industry leading Purion Contamination Shield™ Defense System, for
unsurpassed implant quality, so even the most sensitive devices can
realize optimized device performance. The platform's
proprietary Purion Vector™ dose and angle control system, and
constant focal length scanning deliver the most precise and
repeatable dopant placement available today. The
platform's superior beam current performance combined with the
Purion™ 500wph end station provides the industry's highest
productivity. The Purion platform includes the Purion M™ medium
current implanter, the Purion H™ high current implanter, and the
Purion XE™ high energy implanter.
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered
in Beverly, Mass., has been
providing innovative, high-productivity solutions for the
semiconductor industry for over 35 years. Axcelis is dedicated to
developing enabling process applications through the design,
manufacture and complete life cycle support of ion implantation
systems, one of the most critical and enabling steps in the IC
manufacturing process. Learn more about Axcelis at
www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.