BEVERLY, Mass., May 25, 2016 /PRNewswire/ -- Axcelis
Technologies, Inc. (Nasdaq: ACLS), a leading supplier of
innovative, high-productivity solutions for the semiconductor
industry, announced today that it has received its first order for
the Purion EXE™, an extended energy range option for its industry
leading Purion XE™ high energy implanter. The 200mm Purion
EXE will be used to support the production of specialty devices to
meet the growing demand in the mobile and IoT markets. The system
is scheduled to ship in the second quarter.
John Aldeborgh, executive vice
president, customer operations, commented, "We're excited to be
able to offer customers a new system with the ability to perform
ultra-high energy implants, with extremely precise and deep doping
profiles, on the industry leading Purion XE platform. The
applications for these implants are expanding in the specialty
device markets, providing strong opportunities for the Purion XE
platform."
Bill Bintz, executive vice
president, engineering and marketing, commented, "The Purion
platform's common architecture, in conjunction with its LINAC
technology, has allowed Axcelis to rapidly expand the capabilities
of our high energy product line. As a result, we are able to meet
the emerging needs of device manufacturers, while simultaneously
delivering exceptional reliability, manufacturing flexibility and
capital efficiency. The product line is available in both 200mm and
300mm configurations."
About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative,
high-productivity solutions for the semiconductor industry for over
35 years. Axcelis is dedicated to developing enabling process
applications through the design, manufacture and complete life
cycle support of ion implantation systems, one of the most critical
and enabling steps in the IC manufacturing process. Learn more
about Axcelis at www.axcelis.com.
CONTACTS:
Maureen Hart (editorial/media)
978.787.4266
Doug Lawson (investor relations)
978.787.9552
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SOURCE Axcelis Technologies, Inc.