ASML announces Holistic Lithography product suite for the 7/5 nanometer node at SEMICON West
July 10 2017 - 11:35AM
SAN FRANCISCO, United States, 10 July 2017 - ASML
Holding NV (ASML) today announced lithography, metrology and
software innovations at SEMICON West. ASML's Holistic Lithography
integrates a set of products that enables chip makers to develop,
optimize and control the production process at the 7/5 nanometer
(nm) logic and 16 nm DRAM nodes.
With process nodes continuing to shrink, ASML's TWINSCAN NXE:3400B
EUV lithography system offers the resolution that chip makers need
for the most critical layers of a chip, while the new TWINSCAN
NXT:2000i DUV immersion system features several hardware
innovations, such as redesigned leveling and alignment sensors.
This enables DUV/EUV cross-matching on-product overlay of 2.5 nm
that addresses a mix-and-match production environment for the most
advanced nodes. The lithography systems are complemented by ASML's
new YieldStar 375F metrology system, featuring new optics
technology that generates more accurate metrology data faster to
support our patterning control loop. Additionally, Hermes
Microvision (HMI), which was acquired by ASML last year, expects to
ship the new HMI eP5 e-beam metrology system later this year. This
system features higher resolution and larger field of view electron
optics technology that supports OPC model calibration and pattern
fidelity metrology.
"While each product brings independent value to
the chip manufacturing process, their true strength lies with
working together as part of a well-integrated patterning
ecosystem," said Martin van den Brink, ASML President and Chief
Technology Officer. "Our Holistic Lithography products generate
fast, accurate and continuous data that chip makers use to drive
improved overlay and imaging performance, ultimately enabling the
production of affordable semiconductor chips well into single digit
process nodes."
The TWINSCAN NXE:3400B and YieldStar 375F are
currently shipping to logic and memory customers worldwide. The HMI
eP5 is expected to ship in the second half of this year. The
TWINSCAN NXT:2000i has an ongoing early access program that
includes key hardware innovations as field upgrades. The first
TWINSCAN NXT:2000i that is completely built in our factory is
expected to ship in 2018.
ASML
Media Relations Contacts |
ASML
Investor Relations Contacts |
Monique Mols, phone +31 6 5284 4418 |
Craig
DeYoung, phone +1 480 696 2762 |
Brittney Wolff Zatezalo, phone +1 408 483 3207 |
Marcel
Kemp, phone +31 40 268 6494 |
Sander
Hofman, phone +31 6 2381 0214 |
|
About ASML
ASML is one of the world's leading manufacturers of chip-making
equipment. Our vision is to enable affordable microelectronics that
improve the quality of life. To achieve this, our mission is to
invent, develop, manufacture and service advanced technology for
high-tech lithography, metrology and software solutions for the
semiconductor industry. ASML's guiding principle is continuing
Moore's Law towards ever smaller, cheaper, more powerful and
energy-efficient semiconductors. This results in increasingly
powerful and capable electronics that enable the world to progress
within a multitude of fields, including healthcare, technology,
communications, energy, mobility, and entertainment. ASML is a
multinational company with offices in 60 cities in 16 countries,
headquartered in Veldhoven, the Netherlands. We employ more than
17,600 people on payroll and flexible contracts (expressed in full
time equivalents). ASML is traded on Euronext Amsterdam and NASDAQ
under the symbol ASML. More information about ASML, our products
and technology, and career opportunities is available on
www.asml.com.
Forward Looking Statements
This press release contains forward looking statements, which you
can generally identify by the use of words like "may", "will",
"could", "should", "project", "believe", "anticipate", "expect",
"plan", "estimate", "forecast", "potential", "intend", "continue",
"targets", "commits to secure" and variations of these words or
comparable words. The forward looking statements contained herein
include statements relating to our Holistic Lithography products
enabling the production of affordable semiconductor chips into
single digit process nodes and the expected timing of shipment of
our systems. These statements are not historical facts, but rather
are based on current expectations, estimates, assumptions and
projections and you should not place undue reliance on them.
Forward-looking statements do not guarantee future performance and
involve risks and uncertainties. These risks and uncertainties
include, without limitation, the possibility that our Holistic
Lithography products may not lead to the anticipated benefits,
delays in the production, development and shipment of our systems
and other risks indicated in the risk factors included in ASML's
Annual Report on Form 20-F and other filings with the US Securities
and Exchange Commission. These forward-looking statements are made
only as of the date of this document. We do not undertake to update
or revise the forward-looking statements, whether as a result of
new information, future events or otherwise.
Link to Press Release
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The issuer of this announcement warrants that they are solely
responsible for the content, accuracy and originality of the
information contained therein.
Source: ASML Holding via Globenewswire
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