By Maarten van Tartwijk

AMSTERDAM--ASML Holding NV (ASML) on Wednesday reported a 62% increase in first-quarter net profit as the Dutch semiconductor-equipment maker benefited from higher revenue.

Net profit was 403 million euros ($427 million) in the first three months of 2015, compared with EUR249 million in the same period a year earlier, beating analyst expectations.

Revenue was EUR1.65 billion, up from EUR1.4 billion in the same period last year, thanks to higher sales of its lithography systems that are used to produce chips. The company said it sold 47 systems in the quarter, up from 35 in the same period a year earlier.

ASML, whose clients include large chip makers such as Intel Corp. (INTC) and Samsung Electronics Co. (005930.SE), said it expects to achieve sales of EUR1.6 billion in the second quarter, resulting in a gross margin of 45%.

-Write to Maarten van Tartwijk at Maarten.VanTartwijk@wsj.com

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