KLAC KLA Corporation

SPECIAL PAYMENT AND DELIVERY FORM

The merger consideration will be issued in the name and address provided on the Election Form and Letter of Transmittal unless instructions are given in the boxes below.

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KLA-TENCOR CORPORATION

ELECTION FORM AND LETTER OF TRANSMITTAL

INFORMATION AND INSTRUCTION BOOKLET

This information and instruction booklet from Lam Research Corporation (“Lam Research”) is provided to stockholders of KLA-Tencor Corporation (“KLA-Tencor”). It answers frequently asked questions, briefly describes your options and provides information and instructions on how to make an election as to the form of consideration to be received by you in connection with the merger in which Lam Research will acquire KLA-Tencor (the “Merger”) and, if you hold certificated shares, how to submit your share certificate(s). Any election you make may be subject to proration as set forth in the Agreement and Plan of Merger and Reorganization, dated as of October 20, 2015, by and among Lam Research, Topeka Merger Sub 1, Inc., Topeka Merger Sub 2, Inc. and KLA-Tencor (as it may be amended from time to time, the “Merger Agreement”). We urge you to read all of the instructions to the enclosed Election Form carefully and review the Frequently Asked Questions below, as well as the Merger Agreement and the proxy statement/prospectus, dated January 13, 2016 (as it may be amended from time to time, the “Proxy Statement/Prospectus”), which is being sent to you under separate cover. After reviewing these materials, please complete the Election Form and Letter of Transmittal (“Election Form”) included with these instructions and send it in the enclosed envelope to the exchange agent, Computershare Trust Company, N.A. and Computershare Inc. (the “Exchange Agent”). If you have additional questions after reading these materials, you should contact the information agent, D.F. King & Co., Inc. (the “Information Agent”), at (800) 591-8268 (toll free) or (212) 269-5550 (call collect).

The Election Deadline will be on the fourth business day after satisfaction or waiver of the last of the conditions to the Merger (or such other date and time that Lam Research and KLA-Tencor may mutually agree). Lam Research and KLA-Tencor will issue a press release announcing the date of the Election Deadline at least three business days prior to the date of the Election Deadline. Election Form and Notice of Transmittals must be received by the Exchange Agent no later than 6:00 a.m. Pacific Time on the date of the Election Deadline. In the event that the expected Election Deadline changes, Lam Research and KLA-Tencor will announce the revised date in a press release, on their respective websites and in filings with the Securities and Exchange Commission (the “SEC”). You may also obtain up-to-date information regarding the Election Deadline by calling the Information Agent at (800) 591-8268.

If you hold your KLA-Tencor common stock in “street name” or in another manner, you may be subject to an earlier deadline. You bear the risk of ensuring proper and timely delivery. Therefore, we encourage you to submit your election materials promptly.

FREQUENTLY ASKED QUESTIONS

1. Why have I been sent an Election Form and Letter of Transmittal?

Pursuant to the Merger Agreement, you, as a KLA-Tencor stockholder, have the opportunity to elect the type of merger consideration you will receive for your shares of KLA-Tencor common stock. You may elect to receive (subject to proration, adjustment and certain limitations as set forth in the Merger Agreement), one of the following:

Please note that if you do not make an effective election, or if you revoke a prior election and fail to make another election, you will be deemed to have elected the Mixed Consideration.

If you have any questions regarding the election materials, please contact:

D.F. King & Co., Inc.

48 Wall Street

New York, NY 10005

Banks and Brokers Call Collect: (212) 269-5550

All Others Call Toll Free: (800) 591-8268

Email: lrcx@dfking.com

Included with this information and instruction booklet is an Election Form and Letter of Transmittal. If you also hold shares with a broker, dealer, commercial bank, trust company or other fiduciary, you will receive separate instructions from that broker, dealer, commercial bank, trust company or other fiduciary.

2. What is the Election Form and Letter of Transmittal?

The enclosed Election Form and Letter of Transmittal does two things. First, it lets us know your preferred form of consideration for your KLA-Tencor common shares. Second, it allows you to surrender your share certificate(s) (if applicable) in order to receive payment for the KLA-Tencor common shares that you own.

3. How do I complete the Election Form and Letter of Transmittal?

The Election Form and Letter of Transmittal is divided into separate sections. Instructions for completing each section are set forth in the Election Form and Letter of Transmittal, where applicable. When completed, please sign and date the Election Form and Letter of Transmittal and send it to the Exchange Agent along with your share certificate(s) (if applicable) in the enclosed envelope so that you can make your election to receive (with respect to all of your shares of KLA-Tencor common stock) one of the Mixed Consideration, the Stock Consideration or the Cash Consideration. Please see Question 15 for important information concerning the transmittal of your Election Form and Letter of Transmittal to the Exchange Agent. Please note that if your shares are held jointly, signatures of both owners are required.

Please return your share certificate(s) (if applicable) along with the Election Form and Letter of Transmittal in the enclosed envelope. Do not sign the back of your share certificate(s), except in those circumstances described in Question 16.

4. How do I make an election if I hold my shares through a broker, dealer, commercial bank, trust company or other fiduciary?

If you hold your KLA-Tencor common stock through a broker, dealer, commercial bank, trust company or other fiduciary, you should instruct such broker, dealer, commercial bank, trust company or other fiduciary what election to make on your behalf by carefully following the instructions you will receive from your broker, dealer, commercial bank, trust company or other fiduciary. An election will not be made on your behalf absent your instructions. Your broker, dealer, commercial bank, trust company or other fiduciary may require that you make your election by a deadline that is earlier than the Election Deadline so that they will have sufficient time to communicate your election. Please contact your broker, dealer, commercial bank, trust company or other fiduciary with any questions.

5. When is my Election Form and Letter of Transmittal due?

Your Election Form and Letter of Transmittal and your share certificate(s) (if applicable) must be received by the Exchange Agent by the Election Deadline, which will be 6:00 a.m. Pacific Time on the date of the Election Deadline. The date of the Election Deadline will be four business days after the satisfaction or waiver of the last of the conditions to the Merger (or such other date and time that Lam Research and KLA-Tencor may mutually agree). Lam Research and KLA-Tencor will issue a press release announcing the date of the Election Deadline at least three business days prior to the Election Deadline. In the event that the expected Election Deadline changes, Lam Research and KLA-Tencor will announce the revised date in a press release, on their respective websites and in filings with the SEC. In addition, Lam Research and KLA-Tencor will announce the five-trading day VWAP in a press release, on their respective websites and in filings with the SEC on the business day immediately preceding the date of the Election Deadline. You may also obtain up-to-date information regarding the Election Deadline by calling the Information Agent at (800) 591-8268 (toll free). See the cover of this information and instruction booklet for additional contact information.

If you hold your shares through a broker, bank, commercial bank, trust company or other fiduciary, you must return your election instructions to them in time for them to respond by the Election Deadline. Please refer to the instructions provided by your broker, bank, commercial bank, trust company or other fiduciary.

6. What if I do not send an Election Form and Letter of Transmittal or it is not received, or if I miss the Election Deadline?

KLA-Tencor stockholders that do not make a valid election for any reason will be deemed to have made a non-election, and will receive the Mixed Consideration for each share of KLA-Tencor common stock they own of record.

You will be deemed to have made a non-election if:

You bear the risk of proper and timely delivery of the Election Form and Letter of Transmittal. None of Lam Research, KLA-Tencor, the Exchange Agent or any of their affiliates will be responsible for the consequences of any failure by any third party to act on a timely basis to transmit or process your Election Form and Letter of Transmittal and any related documents.

If you do not make a valid election with respect to any KLA-Tencor common stock you own of record, after completion of the Merger, you will receive written instructions from the Exchange Agent on how to exchange your KLA-Tencor common stock for the merger consideration.

7. I have received more than one set of election materials. Do I need to complete them all?

Yes. If you received more than one set of election materials, this indicates that you own shares in more than one manner or that you own shares in more than one name. For example, you may have shares registered directly with KLA-Tencor, you may own KLA-Tencor common stock through a third party, such as a broker, or you may own stock in both a single name and a joint name. Each set of election materials you receive is specific to the manner in which you hold your KLA-Tencor common stock. Failure to properly complete an Election Form and Letter of Transmittal means that no election will be made with respect to KLA-Tencor common

stock to which that Election Form and Letter of Transmittal applies and you will be deemed to have made a non-election with respect to such KLA-Tencor common stock.

8. Can I revoke or change my election after the Election Form and Letter of Transmittal have been submitted?

Yes. You may revoke or change your election prior to the Election Deadline by submitting a written notice of revocation to the Exchange Agent or by submitting new election materials. Revocations or changes must specify the name in which your shares are registered on the share transfer books of KLA-Tencor and such other information as the Exchange Agent may request. If you instructed a broker, dealer, commercial bank, trust company or other fiduciary to submit an election for your shares, you must follow the directions of your broker, dealer, commercial bank, trust company or other fiduciary for changing those instructions. Whether you revoke or change your election by submitting a written notice of revocation or change or by submitting new election materials, the notice or materials must be received by the Exchange Agent by the Election Deadline in order for the revocation or new election to be valid.

9. Can I sell my shares after submitting an Election Form and Letter of Transmittal?

Before you can sell some or all of your shares of KLA-Tencor common stock after submitting an Election Form and Letter of Transmittal, you will need to timely revoke your election as to the shares which you propose to sell. The person(s) acquiring shares from you will then need to request and timely submit an Election Form and Letter of Transmittal in order to make an election with respect to the acquired shares.

10. Am I guaranteed to receive what I ask for on the Election Form and Letter of Transmittal?

If you elect the Mixed Consideration, then you will receive the Mixed Consideration with respect to each of your shares.

If you elect either the Stock Consideration or the Cash Consideration, then you are not guaranteed to receive what you ask for on the Election Form and Letter of Transmittal. The Merger Agreement contains proration provisions that are designed to cause the average consideration per share of KLA-Tencor common stock to be $32.00 in cash plus 0.5 shares of Lam Research common stock. After the Election Deadline, the Exchange Agent will calculate the amount of cash and number of shares of Lam Research common stock to be distributed to each KLA-Tencor stockholder, based on all valid elections received and in accordance with the proration procedures set forth in the Merger Agreement and described in the Proxy Statement/Prospectus. As a result, if you elect either the Stock Consideration or the Cash Consideration, then your election is subject to proration, adjustment and certain limitations as set forth in the Merger Agreement and further described below and in the Proxy Statement/Prospectus.

Elections for Stock Consideration and Cash Consideration are subject to proration as follows:

available for issuance to fully satisfy such elections (after the issuance of shares of Lam Research common stock in respect of shares of KLA-Tencor common stock that are subject to elections to receive the Mixed Consideration, or no election), then:

KLA-Tencor stockholders who fail to make a valid election for any reason will be deemed to have made a non-election and will receive the Mixed Consideration.

There can be no guarantee as to the value of the merger consideration you receive relative to the value of the shares of KLA-Tencor common stock you are exchanging. None of Lam Research, KLA-Tencor, the Exchange Agent or any of their affiliates are making any recommendation as to whether KLA-Tencor stockholders should elect to receive the Mixed Consideration, the Stock Consideration, or the Cash Consideration. Each KLA-Tencor stockholder must make his or her own decision with respect to the election.

11. Will I receive any fractional shares?

No. No fractional shares of Lam Research common stock will be issued in connection with the Merger. Instead, Lam Research will, at its option, pay cash or distribute proceeds from sales of fractional shares in lieu of delivering any fractional shares of Lam Research common stock that a KLA-Tencor stockholder would otherwise have been entitled to receive.

12. How long will it take to receive the merger consideration after the Merger is completed?

After the effective time of the Merger, upon the surrender of your share certificate(s) (if applicable) (or effective affidavits of loss in lieu of such share certificate(s)), together with a properly completed letter of transmittal, confirmation of book entry transfer, or a properly completed Notice of Guaranteed Delivery, duly executed in completed in accordance with the instructions thereto, and such other documents as may be reasonably required by the Exchange Agent, you will receive the cash and/or shares of Lam Research common stock as soon as practicable from the Exchange Agent.

Lam Research and KLA-Tencor hope to complete the Merger as soon as reasonably practicable and, as of January 13, 2016, expect the closing to be consummated in mid-calendar year 2016. However, the Merger is subject to the satisfaction or waiver of certain conditions, as described in the Merger Agreement, and it is possible that factors outside the control of Lam Research or KLA-Tencor could result in the Merger being completed at an earlier time, a later time or not at all. There can be no assurance as to when or if the Merger will close.

13. What if my shares are certificated, but I cannot locate my stock certificates?

For any election to be effective, if you hold certificated shares, the Election Form and Letter of Transmittal must be accompanied by the original share certificate(s) evidencing your KLA-Tencor common stock and any required accompanying evidences of authority. If any of your certificate(s) representing KLA-Tencor common stock has been lost, stolen or destroyed, contact Computershare Trust Company, N.A. at (877) 282-1169 before making your election. You may be required to post a bond to secure against the risk that the certificates may be subsequently recirculated. The Election Form and Letter of Transmittal and other required documentation cannot be processed until the procedures for replacing lost, stolen or destroyed certificates have been completed.

14. What are the tax consequences associated with each of the election options?

The specific tax consequences of the Merger to you will depend upon the form of merger consideration that you ultimately receive in the transaction. Please refer to the discussion of certain U.S. federal income tax consequences under the caption “Material U.S. Federal Income Tax Consequences” in the Proxy Statement/Prospectus for a more detailed summary of the U.S. federal income tax consequences of the transaction to KLA-Tencor stockholders. However, tax matters are complicated, and the tax consequences of the Merger to you will depend on your particular facts and circumstances. You should consult your own tax advisor for a full understanding of how the Merger will affect your taxes.

15. How should I send in my signed documents and share certificate(s)?

An envelope addressed to the Exchange Agent is enclosed with this package. You may use this envelope to return your Election Form, your share certificate(s) (if applicable) and any additional documentation that may be required to make your election complete. If you do not have the envelope, you may send such materials to:

If you are mailing share certificate(s), we recommend that they be sent (using the return envelope provided) by registered mail, properly insured, with return receipt requested. You may instead choose to send your documentation to the Exchange Agent by an overnight delivery service, also properly insured. The amount of insurance that may be purchased from overnight

delivery services may be greater than the amount that is available if you send the documents by mail. Please do not return any documents to KLA-Tencor, Lam Research or any of their affiliates, or the Information Agent, because they will not be forwarded to the Exchange Agent and your election will be invalid.

Until your share certificate(s), if applicable, are actually received by the Exchange Agent, delivery is not effected; you will continue to hold title to the certificate(s) and bear the risk of loss.

16. Are there any special requirements in respect of signing the Election Form and Letter of Transmittal?

Yes. If the Election Form and Letter of Transmittal is signed by the registered holder(s) of the shares to which the election relates, the signature(s) must correspond exactly with the name(s) as written on the face of the certificate(s) to which the election relates or on the assignment authorizing transfer, without alteration, enlargement or any change whatsoever. If any of the shares as to which an election is being made are owned by two or more joint owners, all such owners must sign the Election Form and Letter of Transmittal exactly as written on the face of the certificate(s). If any shares are registered in different names on several certificates, it will be necessary to complete, sign and submit as many separate Election Forms as there are different registrations. An Election Form and Letter of Transmittal executed by trustees, executors, administrators, guardians, attorneys-in-fact, officers of corporations or others acting in a fiduciary capacity who are not identified as such to the registration must be accompanied by proper evidence of the signatory’s authority to act.

No signature guarantee is required on the Election Form and Letter of Transmittal if (a) the Election Form and Letter of Transmittal is signed by the registered holder(s) (including any participant in The Depository Trust Company’s systems whose name appears on a security position listing as the owner of such shares) of shares surrendered with this Election Form and Letter of Transmittal or (b) such shares are held for the account of a firm that is a bank, broker, dealer, credit union, savings association or other entity which is a member in good standing of the Securities Transfer Agents’ Medallion Program (each, an “Eligible Institution”). In all other cases, all signatures on this Election Form and Letter of Transmittal must be guaranteed by an Eligible Institution.

A stockholder that is a U.S. person (including a resident alien) should complete the enclosed IRS Form W-9 and provide such stockholder’s correct Taxpayer Identification Number (“TIN”). Failure to provide the information on the form may subject the surrendering shareholder to U.S. backup withholding on any reportable payment made pursuant to Lam Research’s acquisition of KLA-Tencor. A stockholder that is a non-U.S. person should use the appropriate IRS Form W-8, a copy of which can be obtained at www.irs.gov. Please review the instructions included on the enclosed IRS Form W-9 for additional information.

17. How do I change my address on the Election Form and Letter of Transmittal?

Mark through any incorrect address information that is printed on the front of the Election Form and Letter of Transmittal. Clearly print the correct address in the area beside the

printed information. If you would like to receive your payment at a different address from that imprinted on the front of the Election Form and Letter of Transmittal, please complete the “Special Payment and Issuance Instructions” box on the Special Payment and Delivery Form included with the Election Form and Letter of Transmittal. Please note that you will need to have your signature guaranteed by an Eligible Institution if you elect this option (see question 16). If you have any questions, please contact the Information Agent at (800) 591-8268 (toll free).

18. What do I do if I want part or all of the merger consideration paid or issued to someone else?

If all or a part of your payment should be issued in a different name than the name(s) on your share certificate, please complete the “Special Delivery Instructions” box on the Special Payment and Delivery Form included with the Election Form and Letter of Transmittal. Please note that you will need to have your signature guaranteed by an Eligible Institution if you elect this option (see question 16). If you have any questions, please contact the Information Agent at (800) 591-8268 (toll free).

19. How can I obtain more information about the Merger?

The Merger will result in KLA-Tencor becoming a wholly owned subsidiary of Lam Research. For a full discussion of the transactions and the effect of your election, see the Merger Agreement and the Proxy Statement/Prospectus. Before making your election, you are encouraged to read carefully the entire Merger Agreement and Proxy Statement/Prospectus (including the annexes thereto and documents incorporated therein by reference) and these instructions.

You are able to obtain free copies of the Proxy Statement/Prospectus and other documents filed with the SEC by Lam Research and KLA-Tencor through the website maintained by the SEC at www.sec.gov. If you wish to request documents, you should do so at least five business days before the Election Deadline. The Proxy Statement/Prospectus is dated January 13, 2016 and does not reflect developments subsequent to that date. However, the Proxy Statement/Prospectus incorporates by reference subsequent filings with the SEC by Lam Research and KLA-Tencor. You should rely only on the information contained or expressly incorporated by reference in the Proxy Statement/Prospectus. We have not authorized anyone to provide you with information that is different from what is contained or incorporated by reference in those documents.

20. Who do I call if I have additional questions?

You may contact D.F. King & Co., Inc., the Information Agent, at (800) 591-8268 (toll free) or (212) 269-5550 (call collect). See the cover of this information and instruction booklet for additional contact information.

NOTICE OF GUARANTEED DELIVERY

This form, or a facsimile hereof, must be used in connection with your election if:

This form and the Election Form and Letter of Transmittal may be delivered by mail or facsimile transmission to the Exchange Agent, and must be received by the Exchange Agent before 6:00 a.m. Pacific Time on the date of the Election Deadline. The Election Deadline will be on the fourth business day after satisfaction or waiver of the last of the conditions to the Merger (or such other date and time that Lam Research and KLA-Tencor may mutually agree). Lam Research and KLA-Tencor will issue a press release announcing the date of the Election Deadline at least three business days prior to the date of the Election Deadline. In the event that the expected Election Deadline changes, Lam Research and KLA-Tencor will announce the revised date in a press release, on their respective websites and in filings with the Securities and Exchange Commission. You may also obtain up-to-date information regarding the Election Deadline by calling the Information Agent at (800) 591-8268 (toll free) or (212) 269-5550 (collect). You are encouraged to return your Election Form and Letter of Transmittal as promptly as practicable.

The Exchange Agent is:

Computershare Trust Company, N.A. and Computershare Inc.

By facsimile transmission:

For Eligible Institution Only: (617) 360-6810

Telephone For Confirmation Only: (781) 575-2332

(This number is ONLY for confirmation of a fax; for information about the election,

please contact the Information Agent, at (800) 591-8268)

Delivery of this form to an address other than as set forth above or transmission via facsimile to a number other than one listed above does not constitute a valid delivery.

The undersigned hereby surrenders to Computershare Trust Company, N.A. and Computershare, Inc., the Exchange Agent, upon the terms and subject to the conditions set forth in the Agreement and Plan of Merger and Reorganization, dated as of October 20, 2015, by and among Lam Research, Topeka Merger Sub 1, Inc., Topeka Merger Sub 2, Inc. and KLA-Tencor (as it may be amended from time to time, the “Merger Agreement”), the proxy statement/prospectus, dated January 13, 2016 and the related Election Form and Letter of Transmittal, receipt of which are hereby acknowledged, the number of common shares of KLA-Tencor set forth on the reverse side of this Notice of Guaranteed Delivery.

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To be effective, this form must be properly completed, signed and delivered, together with your properly completed Election Form, to the Exchange Agent at one of the addresses listed in the Election Information Booklet by the Election Deadline. Do not send your election materials to KLA-Tencor Corporation, Lam Research Corporation or the Information Agent. Notice of guaranteed delivery for physical share presentation by broker must be FAXED to the agent before it is covered.

GUARANTEE

The undersigned, a member firm of a registered national securities exchange, a member of the Financial Industry Regulatory Authority, Inc., or a commercial bank or trust company having an office, branch or agency in the United States, hereby guarantees to deliver to the Exchange Agent certificates representing the shares tendered hereby, in proper form for transfer (or surrender shares pursuant to the procedure for book entry transfer into the Exchange Agent’s account at The Depository Trust Company), together with (i) a properly completed and duly executed Election Form and Letter of Transmittal (or facsimile thereof) with any required signature guarantees, and (ii) any other required document, within three business days after the Election Deadline.

DO NOT SEND SHARE CERTIFICATE(S) WITH THIS FORM.

SHARE CERTIFICATE(S) MUST BE SENT WITH THE ELECTION FORM AND

LETTER OF TRANSMITTAL.

This form is not to be used to guarantee signatures. If a signature on the Election Form and Letter of Transmittal requires a Medallion Signature Guarantee, such guarantee must appear in the applicable space provided on the Election Form and Letter of Transmittal. If you have any questions or would like to request additional copies of the election materials, please call Lam Research’s information agent, D.F. King & Co., Inc., at (800) 591-8268.